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发明名称
METHOD AND DEVICE FOR ETCHING TRANSPARENT CONDUCTIVE FILM
摘要
申请公布号
JPS57119404(A)
申请公布日期
1982.07.24
申请号
JP19810004855
申请日期
1981.01.16
申请人
SUWA SEIKOSHA KK
发明人
MIYAZAWA KANAME
分类号
H01L21/3063;C23F1/46;C25B1/00;H01B5/14;H01L21/306
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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