| 摘要 |
PURPOSE:To reduce the soak current and enhance the resolution of a target by making a semi-insulating film, which is closely in contact with a base plate made of silicon single crystal, to consist of the inner layer made up of cerium dioxide and the outer layer made up of cadmium telluride. CONSTITUTION:A base plate 1 is made up of n type silicon single crystal doped with phosphorus. Phosphorus is diffused in an n type layer 2, while boron is diffused in isle-like p type layers 3. Insulating layers 6 are made to cover the peripheral parts of the p type layers 3. In addition to the above target constitution, a semi-insulating layer, the inner side of which is a cerium dioxide layer and the outer side of which is a cadmium telluride layer, is provided on the surface across which electron beams are scanned. |
