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发明名称
MESSVERFAHREN ZUR BESTIMMUNG DER FORMABWEICHUNG VON REFLEKTIERENDEN PLANFLAECHEN
摘要
申请公布号
DD156037(A1)
申请公布日期
1982.07.21
申请号
DD19810227320
申请日期
1981.01.30
申请人
RIEPEL,GEORG,DD;KRAUSE,MICHAEL,DD;KRUEGER,DIETMAR,DD
发明人
RIEPEL,GEORG,DD;KRAUSE,MICHAEL,DD;KRUEGER,DIETMAR,DD
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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