| 摘要 |
PURPOSE:To perform sound process regardless of precessing conditions by disposing, in a rearstage of two electron guns, a beam adjuster comprising a focusing coil and a deflection coil and by enabling one of the beam adjusters to move axially and the other to shift in the direction perpendicular to the axis. CONSTITUTION:A support column 19 is fixed at a side wall 2 of a welding vacuum chamber 1 and a welding object 10 is disposed at a position confronting the support column 19 inside the welding vacuum chamber 1. Inside the support column 19, an electron gun comprising a cathode 3, a grid 4 and anode 5, and a first beam adjuster 8 comprising a focusing coil 6 and a deflection coil 7, and second beam adjuster 18 comprising a focusing coil 16 and a deflection coil 17 are disposed and a beam 11 is applied upon a workpiece 10. And, the first beam aduster 8 is able to shift axially, while the second beam adjuster 18 is able to shift in a direction perpendicular to the direction of beam axis. In this way, beam focus and beam position can be set optionally. |
