发明名称 POSITION INDICATING SYSTEM
摘要 PURPOSE:To simply position accurately a sample by fixing a large image of a sample, moving a small image of positioning mark, and matching the image of the sample to the mark, thereby alleviating the fatigue of worker's eyes. CONSTITUTION:A sample 2 is projected by image pickup systems 5, 6, and the image is projected on a display unit 7. The image is fixed, the positioning mark 7a displayed on the unit 7 is moved by the positioning device 8, and is matched to the predetermined position for the image of the sample 2. In this manner, the image of the sample 2 is not necessarily moved.
申请公布号 JPS57113236(A) 申请公布日期 1982.07.14
申请号 JP19800189534 申请日期 1980.12.30
申请人 FUJITSU KK 发明人 NAKASHIMA MASAHITO;HIZUKA TETSUO
分类号 G05D3/12;H01L21/60 主分类号 G05D3/12
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