摘要 |
PURPOSE:To simply position accurately a sample by fixing a large image of a sample, moving a small image of positioning mark, and matching the image of the sample to the mark, thereby alleviating the fatigue of worker's eyes. CONSTITUTION:A sample 2 is projected by image pickup systems 5, 6, and the image is projected on a display unit 7. The image is fixed, the positioning mark 7a displayed on the unit 7 is moved by the positioning device 8, and is matched to the predetermined position for the image of the sample 2. In this manner, the image of the sample 2 is not necessarily moved. |