| 摘要 |
PURPOSE:To increase both the vapor deposition efficiency and the magnetic properties, by promoting the ionization with the collision of the heat electron against the vapor current existing near a magnetic matter evaporating source and at the same time controlling the direction of the evaporating distribution of the ionizing vapor distribution to a supporter. CONSTITUTION:A magnetic matter 4 is vaporized at a hearth 3 in a vacuum container 1 with a heating means 5. Then the heat electron which is radiated by the heating of a heat electron radiation source 11 and properly controlled for the process of motion by an ionizing electrode 12 is concentrically hit to a position near an evaporating source and having comparatively high vapor current concentration. Thus the vapor current is ionized with high efficiency and then made to pass through an opening part of an auxiliary converging coil B. Thus the distribution of evaporation is extremely converged, and at the same time the center of the ionizing vapor current is properly displaced. Furthermore the distribution of evaporation is finally converged by a converging electrode 14, and at the same time a desired incident angle is obtained. As a result, the vapor deposition is carried out on the surface of a supporter 10 with high efficiency. |
