发明名称 |
Method to synthesize and produce thin films by spray pyrolysis |
摘要 |
Forming a film by spraying onto a heated substrate an atomized solution containing the appropriate salt of a constituent element of the film and a highly soluble (i.e., greater than 1 M) organic acid in sufficient amount to reduce the oxidation state of at least one solute element of the spray solution after contacting the heated substrate.
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申请公布号 |
US4336285(A) |
申请公布日期 |
1982.06.22 |
申请号 |
US19810231128 |
申请日期 |
1981.02.03 |
申请人 |
RADIATION MONITORING DEVICES, INC. |
发明人 |
SQUILLANTE, MICHAEL R. |
分类号 |
C03C17/22;C23C18/12;H01L31/0336;H01L31/072;H01L31/18;(IPC1-7):B05D1/02;B05D3/02;C03C17/10 |
主分类号 |
C03C17/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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