发明名称 Method to synthesize and produce thin films by spray pyrolysis
摘要 Forming a film by spraying onto a heated substrate an atomized solution containing the appropriate salt of a constituent element of the film and a highly soluble (i.e., greater than 1 M) organic acid in sufficient amount to reduce the oxidation state of at least one solute element of the spray solution after contacting the heated substrate.
申请公布号 US4336285(A) 申请公布日期 1982.06.22
申请号 US19810231128 申请日期 1981.02.03
申请人 RADIATION MONITORING DEVICES, INC. 发明人 SQUILLANTE, MICHAEL R.
分类号 C03C17/22;C23C18/12;H01L31/0336;H01L31/072;H01L31/18;(IPC1-7):B05D1/02;B05D3/02;C03C17/10 主分类号 C03C17/22
代理机构 代理人
主权项
地址
您可能感兴趣的专利