| 摘要 |
PURPOSE:To increase the efficiency of operation and to facilitate maintenance and inspection to various apparatus employed in a line for manufacturing integrated circuits or the like, by enabling to prepare a dustless, constant-temperature and constant- humidity environment with high accuracy for a unit work space in the manufacturing line without forming a chamber. CONSTITUTION:In a screen-like casing 1, there are provided an air outlet port 2 made of a vertical porous plate having a sufficient area for covering the longitudinal section of a unit work space for a manufacturing line and a HEPA filter 3 disposed at the back of the outlet port 2. At the back of the filter 3, there is further provided a pressure equalizing, hollow space 4 to which air is supplied from a fan 5. Further, in an air passage including an air inlet port 6 for the fan 5, there are provided a direct expansion type cooling coil 7. electric heater 8 and refrigerator 9 for the cooling coil 7. With such an arrangement, air drawn from the inlet port 6 is super-cooled by the cooling coil 7 and heated to a predetermined temperature by the heater 8. Then, air controlled to the predetermined temperature is blown out from the outlet port 2 into a transparent hood 16 through the filter 3. |
