发明名称 |
Fluid damped saw accelerometer |
摘要 |
An accelerometer comprising a mass 10 supported on a piezoelectric cantilevered beam 12 with SAW resonators 17, 46 disposed on the surface of the beam includes cover plates 66, 68 over the SAW resonators and sealed to the beam by seals 70, 72 which may be rigid (glass frit) or soft (filled polyimid).
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申请公布号 |
US4333342(A) |
申请公布日期 |
1982.06.08 |
申请号 |
US19800203823 |
申请日期 |
1980.11.03 |
申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
GILDEN, MEYER;CULLEN, DONALD E.;GRUDKOWSKI, THOMAS W. |
分类号 |
G01P15/097;(IPC1-7):G01P15/08 |
主分类号 |
G01P15/097 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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