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发明名称
LINEARITY/FLATNESS MEASURING DEVICE
摘要
申请公布号
JPS5788303(A)
申请公布日期
1982.06.02
申请号
JP19810145631
申请日期
1981.09.17
申请人
VEB CARL ZEISS JENA
发明人
GERUTO SHIYUHIYARUTO
分类号
G01B7/34;G01B7/00;G01B7/305;G01B13/22;G01B21/20;G01B21/30
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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