VAPOR PHASE GROWING METHOD,申请号JP19800163599-传众专利搜索

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发明名称	VAPOR PHASE GROWING METHOD
摘要
申请公布号	JPS5788095(A)	申请公布日期	1982.06.01
申请号	JP19800163599	申请日期	1980.11.20
申请人	FUJITSU KK	发明人	NOGAMI MASAHARU
分类号	C30B25/02;C30B25/08;C30B29/40;H01L21/02;H01L21/205	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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