| 摘要 |
PURPOSE:To improve the corrosion resistance and bonding characteristics of a pad part, by forming the bonding pad of a conductor pattern connected to the function part of a magnetic bubble generator, etc., constituting a memory element, by thin films of permalloy laminated on and connected to the conductor pattern. CONSTITUTION:On a magnetic thin film 13 formed on a nonmagnetic single- crystal substrate, a conductor pattern 15 connected to the function part of a magnetic bubble generator, etc., is formed with a spacer 14 between. Then, an insulating layer 16 is formed, and a part as a bonding pad part 17 is etched away and after a thin film 18 of permalloy connected to the pattern 15 is formed, a protective layer 19 is formed. Consequently, the corrosion resistance and bonding characteristics of the pad part 17 are improved. |
