| 摘要 |
PURPOSE:To obtain positional information by irradiating a positonal matching mark with electron rays to detect characteristic X-rays of a specific element contained in the positional matching mark. CONSTITUTION:A semiconductor base substance 1, which is the substance to be detected, is held by a holder 4 to control electron beam 5 by a deflector 6 for scanning a positional matching mark on a substrate. Said positional matching mark is formed by, for instance, molybdenum. Characteristic X-rays of molybdenum generating by irradiating electron beam is converted into the electric signals by a detector 7 to be amplified by an amplifier 8 for being put out as the positional signals. The detector 7 is consisted of a spectroscope for filtering waves of the X-rays with the specific wave length and a transducer for converting the strength of X-rays into electric signals. |
