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发明名称
摘要
申请公布号
JPS5724646(B2)
申请公布日期
1982.05.25
申请号
JP19750141951
申请日期
1975.11.26
申请人
发明人
分类号
H01L21/60;H01L21/288;H01L21/329;H01L23/48;H01L27/00
主分类号
H01L21/60
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