| 摘要 |
PURPOSE:To enhance photosensitivity characteristics, etc., by laminating an amorphous silicon barrier layer made by the glow discharge decomposition method and an amorphous silicon photoconductor layer made by the same method on a conductive substrate. CONSTITUTION:A 0.2-5mum thick amorphous barrier layer containing 0.05-1 atomic % oxygen made by the glow discharge decomposition method is formed on a conductive substrate, and on this layer a 5-60 mum thick amorphous silicon photoconductor layer containing 10<-5>-5X10<-2> atomic % oxygen, 10-40 atomic % hydrogen, 10-20,000ppm impurities of the group IIIb of the priodic table made by the glow discharge decomposition method is laminated to obtain an electrophotograhic receptor, thus permitting the general characteristics of electrophotography including photosensitivity characteristics to be enhanced. |
