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发明名称
摘要
申请公布号	JPS5723419(B2)	申请公布日期	1982.05.18
申请号	JP19800135353	申请日期	1980.09.30
申请人	PHILIPS NV	发明人	KOOI E
分类号	H01L21/76;H01L21/316;H01L21/331;H01L21/762;H01L21/822;H01L27/04;H01L27/06;H01L29/73	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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