| 摘要 |
PURPOSE:To supply pulses of the clock periods corresponding to the signal change periods of the respective input terminals of an element to be tested to the respective input terminals by using a generating section for clock pulses of multiple kinds of different periods and a sequence control section. CONSTITUTION:The pulse patterns based on the pulses of the clock periods 1 from the generator 1-1 of a signal generator 1 are inputted from a waveform forming circuit 3 to the input terminal group C1 of an element 4 to be tested in accordance with the command stored in the pattern information memory 2-1 of a sequence control section 2. Next, the pulse patterns based on the pulses of the clock period 2 are inputted to an input terminal group C2 in accordance with the command from the section 2. Thereafter, the pulse patterns based on the clock pulses from the clock periods 1-n are inputted to the input terminal groups C1-Cn of the elements 4 in accordance with the commands from the programs of a pattern sequence processor 2-2 in the same manner. Thereby, the pattern information memory of the squence control section is simplified. |
