| 摘要 |
PURPOSE:To measure and inspect the minute area unit of the surface of a photosensitive body by electrifying the surface of the photosensitive body with the electric charge while interrupting the light and projecting a beam which has the prescribed quantity of light and has a minute diameter thereafter to detect the flaw of the photosensitive body in accordance with the current change accompanied with the migration of the electrification electric charge at the time of photoirradiation. CONSTITUTION:After the surface of a photosensitive body 1 is electrified with the electric charge in a dark place, an inspection luminous flux 9a is projected. The radiated part of the photosensitive body 1 reacts on the light and the resistance value of this part is reduced, and the state between the surface of the photosensitive body 1 and a conductive cylinder tube 2 approximates the conductive state, and electrons are so migrated that the electric charge on the surface of the photosensitive body 1 is equalized to the potential of an earth 19 through the conductive cylinder tube 2, a signal line 20, and a current detecting part 22. The quantity of these electrons is proportional to the quantity of electric charge electrified on the surface of the photodetector 1, and this migration of electrons, namely, the current is detected by the current detecting part 22 to find the electrified state of the electric charge, namely, the presence or the absence of the flaw on the surface of the photosensitive body 1. |
