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发明名称
Verfahren zum Abscheiden einer Dünnschicht
摘要
申请公布号
AT276488(B)
申请公布日期
1969.11.25
申请号
AT19670008011
申请日期
1967.08.31
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
分类号
(IPC1-7):H01L7/36
主分类号
(IPC1-7):H01L7/36
代理机构
代理人
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地址
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