| 摘要 |
PURPOSE:To realize certainty and stability from a standpoint of manufacturing by structurally providing plural electricity heat conversion elements and function elements driving the same in a surface layer of a same semiconductor substrate plate to enable certain and stable high speed recording. CONSTITUTION:A semiconductor substrate plate 115 is constituted from an electricity/heat conversion element arranged part 102, a drive circuit part 103 constituted by a function element and a grooved lid member 104. To the grooved lid member 104, grooves 106 covering each electricity/heat conversion elements 105 and a groove 107 for a common liquid chamber 107 are provided. The electricity/ heat conversion elements 105 have a heat generating resistance part 112 provided in order to act heat generated between a common electrode 9 common to said each elements and an electrode 111 connected to a connector part of a transistor 110 as the function element constituting the drive circuit part 103 on a liquid. |
