| 摘要 |
PURPOSE:To enhance voltage measuring accuracy by providing a semispherical drawing electrod between a speed reducing electrode and a drawing electrode made of a plate shaped mesh so as not to change the direction of secondary electrons in the device wherein energy of a secondary electron beam emitted from a specimen when an electron beam is irradiated to the specimen is analyzed. CONSTITUTION:The drawing electrode 8 comprising semispherical mesh, which is concentric with the speed reducing electrode 2, is formed between the drawing electrode 2 comprising plate shaped mesh and the speed redusing electrode 1 comprising the semispherical mesh. The same drawing voltage VE is applied on the electrodes 2 and 8. Therefore, the direction of the secondary electrons 5 which are emitted from the specimen 3 when the electron beam 4 is irradiated is not changed due to an equipotential surface caused by the electrode 2. The secondary electrons 5 are not affected by the potential distribution in the vicinity of a mesuring point (speed reducing electrode). Therefore, highly accurate voltage measurement can be performed. |
