| 摘要 |
PURPOSE:To obtain a long-life electrode for an excimer laser by constructing the surface of the electrodes of zirconium or one of the zirconium alloys. CONSTITUTION:A least the surface of electrodes 1, 1', 2, 2' is constructed of zirconium or at least one of the zirconium alloys. Here, a zirconium alloy is an alloy which contains Sn, Fe, Ni, Cr or Nb, and particularly 'Zircaloy(R)', ozhenite and a Zr-Nb alloy can be referred to. Since the surface of the electrodes to be brought into contact with a mixed gas of HCl+Xe+Ne is constructed of zirconium or a zirconium alloy in this way, the corrosion resis tance becomes extremely excellent and there is little deterioration of the elec trode material, whereby the lift of the laser device is improved. |
