| 摘要 |
<p>A high speed temperature controlled, microcircuit electrometer comprising a preamplifier (32) with a very high resistance feedback resistor (R1) and temperature sensor on a substrate which is temperature controlled by a thermo- electric module on which the substrate (34) is mounted and which is held within a very small range by temperature control circuitry. The preamplifier (32), feedback resistor (R1), temperature sensor and thermo-electric module (38) are all enclosed in a hermetically sealed, dry gas environment, maintained at an essentially constant temperature, to reduce the effects of hostile environments, such as temperature changes, vibration, contamination, and humidity. This electrometer operates at high speed and is highly responsive to small current values such as ion currents generated by ionized gas molecules in a mass spectrometer.</p> |
