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发明名称
ANNEALING DEVICE
摘要
申请公布号
JPS5764936(A)
申请公布日期
1982.04.20
申请号
JP19800140475
申请日期
1980.10.09
申请人
USHIO DENKI KK
发明人
HIRAMOTO TATEKU
分类号
H01L21/26;C30B33/00;H01L21/268;H01L21/324;(IPC1-7):H01L21/32
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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