发明名称 MANUFACTURE OF SEMICONDUCTOR LASER ELEMENT
摘要 PURPOSE:To improve productivity, by using amorphous Si or poly Si for a flush type hetero-junction-structure semiconductor laser filling layer. CONSTITUTION:An N type GaAlAs layer 3, a GaAs active layer 4, a P type GaAlAs layer 5 and a P type GaAs layer 6 are laminated in turn on an N type GaAs substrate 2, and after stripe sections on the center of the layer 3-6 are removed by etching, a morphous Si or poly Si is allowed to make vapor growth, and electrodes 9 and 10 are formed by flattening the surface. It is possible, by doing so, to obtain sigle-style semiconductor laser with a good productivity.
申请公布号 JPS5763883(A) 申请公布日期 1982.04.17
申请号 JP19800140158 申请日期 1980.10.06
申请人 MITSUBISHI DENKI KK 发明人 TAKIMOTO TOYOHIRO;IKEDA KENJI
分类号 H01S5/00;H01S5/227 主分类号 H01S5/00
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