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发明名称
VERFAHREN ZUR HERSTELLUNG VON STREIFENFILTERN
摘要
申请公布号
DE3126320(A1)
申请公布日期
1982.04.15
申请号
DE19813126320
申请日期
1981.07.03
申请人
DAINIPPON SCREEN MANUFACTURING CO., LTD., KYOTO, JP
发明人
SHIMIZU, HIROFUMI;YAMANO, AKIRA;IKEUCHI, SHINZO, JP;SHIMIZU, HIROFUMI, UKYO, KYOTO, JP;YAMANO, AKIRO, FUSHIMI, KYOTO, JP;IKEUCHI, SHINZO, KITA, KYOTO, JP
分类号
G02F1/1335;G03F7/00;H01L31/0216;(IPC1-7):02B5/22;03F7/26
主分类号
G02F1/1335
代理机构
代理人
主权项
地址
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