发明名称 TIN OXIDE COATINGS
摘要 Electrically-conductive films of tin oxide are prepared by a novel process utilizing gaseous chemical compounds which react to form a tin-fluorine bond at a temperature which is (1) high enough so that the newly-created tin-fluorine bond-bearing molecule remains in the vapor phase; and (2) low enough so that oxidation of the molecule occurs only after the indicated re-arrangement. Films prepared by the process of the invention are characterized by surface resistances as low as 1 ohm per square when the film thickness is as thin as about a micron. These films are also characterized by extremely good reflectance of infrared radiation.
申请公布号 CA1121666(A) 申请公布日期 1982.04.13
申请号 CA19780313867 申请日期 1978.10.20
申请人 GORDON, ROY G. 发明人 GORDON, ROY G.
分类号 B32B7/02;B32B9/00;C01G19/02;C03C;C03C17/245;C23C;C23C16/40;H01B1/08;H01B5/14;H01C17/14;H01G9/20;H01J9/20;H01L31/00;H01L31/02;H01L31/04;H01L31/18;H01M14/00;H05B3/84 主分类号 B32B7/02
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