| 摘要 |
PURPOSE:To remove the turbulence of a gas flow, and to increase the flow rate of a gas while preventing the lowering of a laser output by fine particles by mounting a capacitor onto the side surface of a cathode and using a nozzle. CONSTITUTION:Nozzles 8, 12 are set up, peaking capacitors 1 are fitted onto the side surfaces of a cathode 7 while structure in which a gas having rectification action flows through the nozzles 8, 12 and discharge electrodes 6, 7 from the sides is formed, and structure in which a gas flow is not prevented by the peaking capacitors 1 and pre-ionizing pins 3 is shaped. Accordingly, the gas does not collide with the capacitors 1, and the nozzles 8, 12 are used, thus obviating the turbulence of the gas flow due to return paths 13 in an oscillator, then preventing the lowering of a laser output. |
