SUBSTRATE CLAMP FOR USE IN SEMICONDUCTOR FABRICATION,申请号IL19810064648-传众专利搜索

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发明名称	SUBSTRATE CLAMP FOR USE IN SEMICONDUCTOR FABRICATION
摘要
申请公布号	IL64648(D0)	申请公布日期	1982.03.31
申请号	IL19810064648	申请日期	1981.12.25
申请人	VEECO INSTR INC	发明人
分类号	H01L;H01L21/68;H02N13/00;(IPC1-7):H01L/	主分类号	H01L
代理机构		代理人
主权项
地址

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