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发明名称
ENKEIKIBANNOHOJISOCHI
摘要
申请公布号
JPS5753929(A)
申请公布日期
1982.03.31
申请号
JP19810117588
申请日期
1981.07.27
申请人
SIEMENS AG
发明人
BONU BONU
分类号
H01L21/683;C23C14/24;C23C14/50;H01L21/203;H01L21/285;H01L21/31;H01L21/673
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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