| 摘要 |
PURPOSE:To get a highly accurate disk on plane without creating sled on the disk by making a high efficient processing through high processing performance, putting both plane tools in high speed rotation to the mutually opposite directions. CONSTITUTION:One surface of the disk 1 is set in contact with the plane tool 3a, the plane tool 3b is pressed on the other side of the disk 1, its axial position is fixed by the disk 1, the plane tools 3a and 3b are set in a mutual rotation to the opposite directions by the motors 22a and 22b adding pressure upon non-oscillating plane tool 3a, then polishing is carried out by supplying both surfaces of the disk 1 with polishing fluid through pipe 17 putting the disk 1 in drive rotation by rotating roller 2c by motor 19. Therefore, the disk may be polished with high accuracy on plane without sled keeping identity of processing pressure by both of the tools. |
