| 摘要 |
PURPOSE:To facilitate a process control by arranging a washing unit in the surface- processing device applying mechanical processing by means of a scrub tool to a substrate to be processed and by washing thereby the scrub tool already used for processing the substrate. CONSTITUTION:The substrate 1 on a holding board 2 being rotated, water is dashed from a water pipe. And, the scrub tool 4 is made to touch the surface of the substrate 1 by a pressing force, removing the dirt on the surface and the extraordinary projection thereof through scrubbing. Next, by the rotation of a take-up reel 6, the scrub tool 4 is rolled up. The washing unit 11 is provided in a part of this course. In the washing tank 12 of the unit 11 is arranged a dipping roller 13, while in the upper part thereof being arranged a tension roller 14, and thereby the part of the scrub tool 4 already used is washed to remove alien substances or dirt sticking thereto. By this constitution, the surface processing of the substrate and the washing of the scrub tool used for the processing are conducted simultaneously, whereby the process control can be facilitated. |
