| 摘要 |
PURPOSE:To detect the precise pressure at the nozzle position so as to increase the response speed and to perfectly carry out the feedback control, by joining a nozzle plate body having a pressure-sensitive element to a nozzle tip. CONSTITUTION:An opening 10 formed in the center of a thin film diaphragm section 8a of the nozzle plate body 8, and the pressure-sensitive element 9 is provided to the diaphragm section 8a around the opening 10. The diaphragm section 8a and the nozzle tip 11 having a nozzle 12 is so joined that the nozzle 12 is situated above the opening 10. Accordingly, at the same time when liquid under pressure is jetted from the nozzle, the pressure of the liquid can be detected by the pressure-sensitive element. |
