| 摘要 |
PURPOSE:To facilitate photoetching, by giving a three-layer metallize structure only to frame parts required for hermetical sealing of a crystal vibrator with a frame and a box-form vessel and by giving a two-layer metallize structure to the other part. CONSTITUTION:Metallic films 31a and 31b consisting of two layers of Cr and Au are stuck to a crystal plate 12 which is polished sufficiently smoothly and has the surface cleaned. Next, a sealing frame part required for hermetical sealing is formed on metallic films 31a and 31b by patterns of photo resistors 22a and 22b, and SiO2 23a and 23b are stuck. Next, photo resistors of the sealing frame pattern are exfoliated, and SiO2 films stuck onto photo resistors are exfoliated, and the metallic layer of the sealing frame part is etched after this metallic layer is exposed. Next, metallic films 23a and 32b consisting of three layers of Cr-Ni-Au or Cr-NiCr-Au are stuck, and SiO2 films are etched, thus obtaining a crystal plate where three-layer metallic films are stuck only to the sealing frame part. |
