| 摘要 |
PURPOSE:To improve the accuracy in probing by bonding airtightly glass having a plurality of pressure introducing holes, being equal in the coefficient of thermal expansion to a silicon pressure sensor substrate, onto said one substrate having a plurality of pressure sensitive parts in a flow speed measuring probe. CONSTITUTION:A bolosilicate glass with semisphere pressure introducing part 3 having a plurality of pressure introducing holes 4 is installed on the end part of a cylinder 7. To the cylinder side of the pressure introducing part, a piezo resistance type pressure sensor 8 of a silicon substrate is coupled with the anode airtightely, and on the substrate, a pressure sensitive part is formed on the position of the end of the pressure introducing hole. When the pressure introducing part contacts with a fluid, pressure of the fluid applies stress to a silicon film, the stress thereof can be taken out as an electric resistance change due to a piezo resistance effect via an electric terminal 10 from a lead wire 14. Hereby, since only one pressure sensor is used, little difference among characteristics of the respective pressure sensitive parts exist at low cost. Further, the coefficient of thermal expansion of the pressure sensor is equal to that of the pressure introducing part, and no adhesive is used, therefore, unnecessary stress due to heat is not generated in the sensor. |
