| 摘要 |
PURPOSE:To make the decision of non-defectives easy by detecting that the inspection signal from a pattern generating circuit for inspection is supplied to the inspection input terminals of the circuit group to be inspected and that the signals from the same output termianls of said group are the same at the function test for ICs or the like using digital signals as input and output signals. CONSTITUTION:The input pulse train from a pattern generating circuit PG is applied to the input terminals of circuits to be inspected, for example, ICs1-n to be measured. Of (m)-pieces of output pulse trains from the ICs1-n, (n)-pieces of the signals of the same terminals are applied to detecting circuits D1-m. If all of the ICs1-n are non-defective, ''1''s are outputted to all of the outputs of (m)-pieces of the detecting circuits, and if even one piece of defective is included, ''0''s are outputted to a number of these. Hence, when the results thereof are applied to a decision circuit H, for example, an OR circuit, a ''0'' is outputted if there are no defects and a ''1'' is outputted if there is any defective. Thereby, the inspection is possible in a short time with less time required for preparation for the inspection and the decision of non-defectives is easily accomplished. |
