发明名称 DETECTION OF CRACK OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To detect cracked elements surely with simple operation and easy judgement of defectives and non-defectives by producing stress forcibly in the inside and detecting the sound from cracks. CONSTITUTION:A detector 2 has a sound detector 3 mountable to a package 1 contg. a pellet 1' which is an object to be detected, an amplifier 4, a high-pass filter 5 and a display device or deciding device 6. A circuit of the pellet 1' is constituted so as to be applied with voltages E1, E2. If a switch 7 is turned on to apply voltage to the pellet 1', the pellet evolves heat by itself and generates thermal stress. If a microcrack is produced in the pellet, the crack is progressed by the thermal stress and a sound is produced at this time. This sound is detected by the detector 2, by which the presence or absence of the crack is decided visually or by the deciding device. Only the crack progressing vibration discriminated from external vibrations is detected by the filter 5. It is equally well to utilize the on sgnal of the switch 7 for the trigger signal of the display device 6.
申请公布号 JPS5748651(A) 申请公布日期 1982.03.20
申请号 JP19800123565 申请日期 1980.09.08
申请人 HITACHI SEISAKUSHO KK;HITACHI IRUMA DENSHI KK 发明人 ANDOU KENJI;YOSHIOKA TOSHIAKI;MURAKAMI KENSUKE
分类号 H01L21/66;G01N29/14 主分类号 H01L21/66
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