| 摘要 |
PURPOSE:To increase regions wherein preparatory ionization is performed and lengthen a discharge gap, by providing auxiliary electrodes performing preparatory ionization respectively on the rear parts of the first and second main discharge electrodes of a discharge-pumped short-pulse laser device. CONSTITUTION:A high-voltage pulse power supply 6a impresses high-voltage between an anode 3a and a metal electrode 5a, while a high-voltage pulse power supply 6b impresses high-voltage between a cathode 3b and a metal electrode 5b respectively. In the opening parts 7, 7 provided on the anode 3a and the cathode 3b, creeping discharge is generated along the dielectrics 4a and 4b. A part of electrons generated by this discharge and the electrons to be photoionized by ultraviolet rays generated by discharge become the species for making the main discharge a uniform discharge in a glow state. Preparatory ionization regions 9a and 9b preparatory-ionize the peripheries of the anode 3a and the cathode 3b respectively. Next, when high-voltage from a high-voltage pulse power supply 1 is impressed between the anode 3a and the cathode 3b, the uniform main discharge 8 in a glow state is generated. |
