发明名称 |
Fabrication of palladium anode for X-ray lithography |
摘要 |
A fabrication process for making palladium-plated target anodes for X-ray lithographic systems is characterized by a unique sequence of surface preparation, plating and annealing steps. Anodes made by the process have been operated reliably at high-power levels for extended periods of time.
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申请公布号 |
US4319967(A) |
申请公布日期 |
1982.03.16 |
申请号 |
US19790090422 |
申请日期 |
1979.11.01 |
申请人 |
BELL TELEPHONE LABORATORIES, INCORPORATED |
发明人 |
VRATNY, FREDERICK;ANDREWS, JR., JOHN M. |
分类号 |
C25D3/50;C25D5/10;C25D5/50;H01J35/10;(IPC1-7):C25D5/10;C25D5/34 |
主分类号 |
C25D3/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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