| 摘要 |
PURPOSE:To measure microscopic displacement and inclination, confirming a measuring point, by projecting a visible light beam for confirming a measuring point, and a measuring light beam, on the surface to be measurd, by an optical fiber, and photodetecting a reflected ray by an optical fiber which has been placed adjacently. CONSTITUTION:A light beam is projected from a projecting optical fiber 6, and a reflected ray from a surface 8 is detected by a photodetecting optical fiber 10. The quantity of light which has been reflected by a shaded portion in the figure increases linearly up to a distance d3 where the short diameter (l) is < the diameter D of the fiber, and after that, decreases linearly. In this case, an optical fiber consisting of 3 layers is formed by use of glass whose refractive index is smaller gradually toward the outside from the center. To the center layer is projected a visible light beam for confirming a measuring point, and to an intermediate layer 12 is made incident a measuring light beam. A reflected ray from a ringlike part on th surface 8 is detected by an outside layer 14, and is photoelectrically converted. In case when the detected value is different in each part, inclination of the surface 8 is shown, and in case when it is equal, displacement of the surface 8 is shown, by said value. In this way, microscopic displacement and microscopic inclination are measured, confirming the measuring point. |
