| 摘要 |
PURPOSE:To eliminate the defect such as an incomplete contact or the like, between the vibrating surface and an object to be measured that caused by a connection between an electrode and a lead wire, by providing the electrodes on the two opposite surfaces of a high molecular piezo-electric element and forming the lead wire connected to the electrode on the piezo-electric element. CONSTITUTION:Electrodes 53 and 55 are provided on the two opposite surfaces of a high molecular piezo-electric element 51, and lead wires 57 and 59 connected to the electrodes 53 and 55 each are formed on the element 51. For instance, plural pieces of strip-shaped electrodes 53 plus the lead wires 57 connected to the electrodes 53 each are formed on the surface of the thin film type element 51 by the vacuum evaporation of Al or the like process, electrodes 55 corresponding to the electrodes 53 plus lead wires connected to the electrodes 55 ech plus a common line 59' are formed in the same way on the rear surface of the element 51. Then the middle part of the element 51 is supported fixedly on a packing member 30, and this supported part is used as a vibrating part. The lead wire protruded from the member 30 of the element 51 is bent toward the member 30 to form an array type probe. |
