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发明名称
DEVICE FOR MEASURING ELECTROPHYSICAL PARAMETERS OF IGFE-STRUCTURES
摘要
申请公布号
SU905885(A1)
申请公布日期
1982.02.15
申请号
SU19802926071
申请日期
1980.05.20
申请人
PENZENSKIJ POLT INSTITUT
发明人
MARTYASHIN ALEKSANDR I,SU;RYZHOV VIKTOR F,SU;MELNIKOV ARKADIJ A,SU;SVETLOV ANATOLIJ V,SU;TSYPIN BORIS V,SU;CHAJKOVSKIJ VIKTOR M,SU
分类号
H01L21/66;G01R31/26;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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