发明名称 METHOD OF STABILIZING SURFACE OF SILICON DEVICE
摘要 <p>Passivation of aluminum-metallized silicon components by applying at least one silicon layer. For the purpose of the subsequent contacting, the components are annealed after the application of the silicon layer at a temperature from 480 DEG to 570 DEG C. if the silicon layer thickness exceeds 0.1 mu m and a temperature from 400 DEG to 500 DEG C. if the silicon layer is up to about 0.1 mu m thick, it being possible to omit the annealing operation if the silicon layer thickness is less than about 0.05 mu m.</p>
申请公布号 JPS5726443(A) 申请公布日期 1982.02.12
申请号 JP19810085549 申请日期 1981.06.03
申请人 发明人
分类号 H01L23/52;H01L21/314;H01L21/3205;H01L21/321;H01L21/56;H01L21/60 主分类号 H01L23/52
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