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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPS5719376(A)
申请公布日期
1982.02.01
申请号
JP19800093284
申请日期
1980.07.10
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
KIMIZUKA MASAKATSU;HIRATA KAZUO
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
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