| 摘要 |
PURPOSE:To form uniform eutectic on all the surface of the pellet in a short time by vibrating a heater block in the direction different from the vibrating direction of a collet and changing the relative scrubbing directions of the pellet and the member of the container side. CONSTITUTION:The pellet 3 sucked by the collet 4 is fixed to a heater block 2A, and compressed to, e.g., a gold plated layer of a heated lead frame 1A. At this time, the collet 4 is vibrated by a vibrator 7 in the direction of A. The block 2A is also vibrated by a vibrator 8 in the direction B which is different from the direction A. For examle, the vibration is imparted in the directions crossing at a right angle at the same frequency, with the phases being changed. The pellet 3 and the plated layer are relatively moved and scrubbed in of vibrating direction of one side is changed, scrubbing frequency or vibrating direction of one side is changed, scrubbing is made in the other shape. In this method, even though the adhesion between the pellet 3 and plated layer is poor, the gold-silicon eutectic can be uniformly grown, reliability is enhanced, and the bonding time can be reduced. |
