| 摘要 |
PURPOSE:To rapidly and accurately detect the moving speed of a linear motor by comparing the output voltage of a circuit equivalent to the state of stopping a driving coil by applying a driving force thereto with the terminal voltage of the coil to detect the moving speed of the motor. CONSTITUTION:An equivalent circuit 19 which exhibits an equivalent state as a driving force is applied to a driving coil 5 to stop it provided, and a current is supplied from a driving circuit 15. A differential amplifier 22 compares the voltage of one ends 23, 24 of the coil 5 and the circuit 19, i.e., the terminal voltage of the coil 5 with the output voltage of the circuit 19. The output of a differential amplifier 22 is fed back as a speed signal through a phase compensator 26 to the circuit 15. Thus, the moving speed of the coil can be rapidly and accurately detected. |
