| 摘要 |
PURPOSE:To form stably a diamond film by introducing gaseous hydrocarbon and hydrogen into a reaction chamber, generating plasma in the chamber by electron cyclotron resonance, and growing diamond on a substrate in the vapor phase. CONSTITUTION:A coil 2 for an electromagnet is placed around a reaction chamber 1 to apply a magnetic field to the camber 1, and microwaves are introduced into the chamber 1 through a waveguide 3. At the same time, gaseous hydrocarbon and hydrogen are introduced into the chamber 1 through a gas introducing pipe 4. Electron cyclotron resonance is caused, electrons collide with the gaseous hydrocarbon to generate plasma, and diamond is grown on a substrate 5 in the vapor phase. The volume of the gaseous hydrocarbon in the chamber 1 is adjusted to <=50% of the total volume of the gaseous hydrocarbon and hydrogen. |
