发明名称 Semiconductor-glass composite material and method for producing it
摘要 A semiconductor-glass composite material comprises at least one semiconductor bonded to a glass substrate, with the semiconductor layer having a strain epsilon </=0.3 per mil, and a dislocation density NV</=2x106 cm-2. In a process for producing the semiconductor-glass composite material, the semiconductor and glass are heated to a bonding temperature, bonded under pressure, and tempered at a temperature Ta such that the viscosity of the glass at Ta is 1012 to 1013.5 poise, and the following relationship holds: <IMAGE> wherein alpha G and alpha S are the coefficients of expansion of the glass and semiconductor, respectively, and T is temperature. The composite material is then cooled to room temperature.
申请公布号 US4311743(A) 申请公布日期 1982.01.19
申请号 US19790080948 申请日期 1979.10.01
申请人 LICENTIA PATENT-VERWALTUNGS GMBH 发明人 KASPER, ERICH;WEBER, SUSO
分类号 H01J1/34;H01J29/00;H01L21/316;H01L21/58;(IPC1-7):32B3/02;03B27/00;32B17/06 主分类号 H01J1/34
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