| 摘要 |
PURPOSE:To improve reliability by evading an electromagnetic damage due to abrasive grains, by covering an electrode pattern with an insulator protective film in the manufacture of a sapphire-made pickup stylus. CONSTITUTION:After an Al thin film 3 is vapor-deposited on a sapphire substrate 8 under vacuum, a porous Al2O3 film 4 is formed and photoresist 5 is used to an inverse pattern of an electrode pattern. Then, a voltage is applied in an ethylene glycol solution of antimony borate to convert the porous film 4 accurately. Then, the photoresist is peeled off and the part is applied with a voltage in a solution of sulfuric acid to form a porous Al2O3 film. Lastly, a voltage is applied in the said solution to form an electrode 7, which is coated with dense Al2O3. |
