RESONANT AFTASTER OG FREMGANGSMAADE TIL FREMSTILLING

摘要

Micro-miniature resonant reading-off structures are manufactured in accordance with microprocessing/micro- manufacturing techniques. The structures comprise thin film deposits of piezoelectric materials. Such piezoelectric deposits can be excited electrically using metallic conductive paths during the manufacture or optically. The resonance frequency for the reading-off structure is varied by subjecting it to a physical variable, such as pressure, temperature, flow speed, etc. In the same way the resonance frequency of the units can be detected electrically or optically. The micro-miniature resonance structures comprise both ribbons and wires, hollow beams and restrained hollow beams, and single and double terminated beam resonance structures, such as tuning forks.